Lam Research unveils deposition technique for next-generation microelectromechanical sensors
The company's PLD tool Pulsus features AlScN films with the highest scandium content available
Lam Research has developed a production-oriented pulsed laser deposition (PLD) tool called Pulsus, it said in a press release dated March 26.
Thank you for visiting S&P Global AutoTechInsight.
*A subscription to News & Analysis includes four S&P Global-selected sector-specific analytical pieces per month. Access to all analytic pieces across all domains comes with a subscription to All Domains. Please click here to subscribe.
To get access to the AutoTechInsight full suite of services, please contact a sales representative by clicking here.
Already a subscriber? Please log in here
